Capacitance humidity sensor
AssigneeYoshio Imai
InventorsYoshio Imai, Yoichi Nabeta, Tadao Inuzuka
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Abstract
A capacitance humidity sensor according to the disclosure a non-conductive base plate, electrodes oppositely arranged on the base plate, a metal compound membrane formed by ion-plating independently on the electrodes, the metal compound membrane being roughened on its surface by plasma etching and being active to the humidity, and a moisture permeable metal skin formed on the metal compound membrane. The metal compound is preferably an oxide or nitride of aluminum or magnesium.
Claims5
A capacitance humidity sensor which comprises a non-conductive base plate, electrodes oppositely arranged on the base plate, a metal compound membrane formed by ion-plating independently on the electrodes, said metal compound membrane being roughened at its surface by plasma etching and being active to the humidity, and a moisture permeable metal skin formed on the roughened surface of the metal compound membrane.
Dependencies are inferred from the claim text.