Spray head apparatus
AssigneeInternational Business Machines Corporation
InventorsPeter Bakos, Russell E. Darrow, Joseph Funari, Diane L. Redpath
Life of this patent
Estimating the term…
Abstract
An elongated member is provided in the discharge orifice of a spray head nozzle so that the fluid being sprayed is discharged as a hollow stream resulting inter alia in a better and more complete atomization of the fluid in coaction with a low pressure propellant.
Claims5
Non-electrostatic spray head apparatus for spraying a layer of photoresist material on the surface of a predetermined circuitizable workpiece, said layer being subsequently finalized as a photoresist mask for coacting with said surface to circuitize said workpiece, said apparatus comprising:
- nozzle means having at least one discharge orifice for discharging a predetermined fluid of said material,
- a non-electrically connected springlike member having plural coils compressively housed within said nozzle means, said coils having a longitudinal first axis, said member having a longitudinal elongated vibratile extension integral with an end coil of said springlike member, said extension having a longitudinal center second axis and being disposed in said hollow tip and protruding outwardly from said orifice to discharge said photoresist fluid from said orifice as a hollow-shaped stream, said first and second axes being colinear, said fluid being discharged from said orifice along said extension, and a source of pressurized propellant for providing said pressurized propellant external to said orifice to intercept the discharged said fluid, said hollow-shaped stream of said discharged fluid coacting with said intercepting propellant to vibrate said extension transverse to said longitudinal center axis, the vibrations of said extension in combination with said intercepting propellant and said hollow-shaped stream coacting to atomize said fluid into a spray having a uniform distribution characteristic to apply said layer with a substantially uniform thickness on said surface.
Non-electrostatic spray head apparatus for spraying photoresist as a photoresist layer on the surface of a predetermined circuitizable workpiece, said layer being subsequently finalized as a photoresist mask for coacting with said surface to circuitize said workpiece, said apparatus comprising in combination:
- a nozzle having a hollow elongated tip terminating in an orifice for discharging said photoresist as a fluid therefrom,
- a non-electrically connected springlike member having plural coils compressively housed within said nozzle, said coils having a longitudinal first axis, said member having a longitudinal elongated vibratile extension integral with an end coil of said springlike member, said extension having a longitudinal center axis and being disposed in said hollow tip and protruding outwardly from said orifice to discharge said photoresist fluid from said orifice as a hollow-shaped stream, said first and second axes being colinear, and
- a source of low pressurized propellant for providing said pressurized propellant external to said orifice to intercept said discharged hollow-shaped stream of said photoresist fluid, said discharged hollow-shaped stream of photoresist fluid coacting with said intercepting propellant to vibrate said extension transverse to said longitudinal center axis, the vibrations of said extension in combination with said intercepting propellant and said hollow-shaped stream coacting to atomize said photoresist fluid into a spray having a uniform distribution characteristic that deposits said layer with a substantially uniform thickness on said surface of said workpiece.
Non-electrostatic spray head apparatus for spraying a photoresist layer on the surface of a metallized printed-circuitizable layer of a predetermined substrate, said photoresist layer being subsequently finalized as a photoresist mask for coacting with said surface to circuitize said metallized layer, said apparatus comprising in combination:
- a nozzle having a hollow elongated tip terminating in an orifice for discharging said photoresist as a fluid therefrom,
- a non-electrically connected springlike member having plural coils compressively housed within said nozzle, said coils having a longitudinal first axis, said member having a longitudinal elongated vibratile extension integral with an end coil of said springlike member, said extension having a longitudinal center second axis and being disposed in said hollow tip and protruding outwardly from said orifice to discharge said photoresist from said orifice as a hollow-shaped stream, said first and second axes being colinear, and
- a source of low pressurized propellant for providing said pressurized propellant external to said orifice to intercept said discharged stream of said photoresist, said hollow-shaped discharged stream coacting with said intercepting propellant to vibrate said extension transverse to said longitudinal center axis, the vibrations of said extension in combination with said intercepting propellant and said hollow-shaped stream coacting to atomize said photoresist into a spray having a uniform distribution characteristic that deposits said photoresist layer with a substantially uniform thickness on said surface of said metallized layer of said substrate.
Dependencies are inferred from the claim text.