US 4,392,287 AGranted

Quartz resonator processing system

AssigneeThe United States of America as represented by the Secretary of the Army

InventorRoswell D. M. Peters

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Abstract

Disclosed is a single chamber ultra-high vacuum processing system for the oduction of hermetically sealed quartz resonators wherein electrode metallization and sealing are carried out along with cleaning and bake-out without any air exposure between the processing steps. The system includes a common vacuum chamber in which is located a rotatable wheel-like member which is adapted to move a plurality of individual component sets of a flat pack resonator unit past discretely located processing stations in said chamber whereupon electrode deposition takes place followed by the placement of ceramic covers over a frame containing a resonator element and then to a sealing stage where a pair of hydraulic rams including heating elements effect a metallized bonding of the covers to the frame.

Claims18

Dependent claims

Apparatus for processing quartz crystal resonators in a relatively high vacuum environment, comprising:

a unitary processing chamber including means for evacuating said chamber during a multi-step fabrication procedure;
a rotatable resonator component holder, for at least one set of resonator components including a frame containing a resonator element, cover means therefore and a separator element for positioning cover means in spaced-apart relationship adjacent said frame, said holder being located in said chamber and removable therefrom;
means for rotating said holder past a plurality of processing stations;
means located at a first of said plurality of processing stations for applying a metallization pattern defining electrode means on said resonator element;
means located at a second of said plurality of processing stations for positioning said cover means on said frame including an actuator means for moving said cover means past said separator element and into registration with said frame;
and
means located at a third of said plurality of processing stations for sealing said cover means on said frame to provide a hermetically sealed unit.

4 more elements

Dependencies are inferred from the claim text.

Facts

Application: 06/174,771Filed 1 Aug 1980
Granted: 12 Jul 1983
Term ends: Not estimatedThe source records don’t support an estimate.

Classification7 codes

H03H 3/02
For the manufacture of electromechanical resonators or networks: for the manufacture of piezoelectric or electrostrictive resonators or networks
H10N 30/06
Manufacture or treatment: forming electrodes or interconnections, e.g. leads or terminals
H10N 30/875
Electrodes or interconnections, e.g. leads or terminals: further connection or lead arrangements, e.g. flexible wiring boards, terminal pins
Y10T 29/42
Metal working: piezoelectric device making

Family

No related US applications are recorded in the indexed filing history.

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