Adherent perfluorinated layers
AssigneeRCA Corporation
InventorsGrzegorz Kaganowicz, John W. Robinson
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Abstract
A method for forming a perfluorinated polymeric film having improved adhesion to a substrate surface whereby the substrate surface is initially glow discharged in the presence of nitrogen, and then a polymeric film is deposited on the substrate surface by subjecting the surface to a glow discharge in the presence of a precursor comprising a compound selected from the group consisting of perfluorocycloalkanes, perfluorocycloolefins and perfluoroalkyl-substituted derivatives thereof.
Claims8
In a method for forming a perfluorinated film comprising the step of depositing a polymeric film on a substrate surface by subjecting the surface to a glow discharge in the presence of a precursor comprising a compound selected from the group consisting of perfluorocycloalkanes, perfluorocycloolefins and perfluoroalkyl-substituted derivatives thereof;
- the improvement which comprises the additional step of exposing the substrate surface to a glow discharge of a gas consisting essentially of nitrogen prior to the depositing step.
Dependencies are inferred from the claim text.