Methods of making infrared detector array cold shield
AssigneeThe United States of America as represented by the Secretary of the Army
InventorWallace L. Freeman
Life of this patent
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Abstract
An infrared detector array is covered by an insulation subcoat atop which o metal layers are applied. The first layer is a thin sputtered or evaporated layer atop which the thick layer is electroplated. Holes through the metal layers uncover the individual detectors of the array.
Claims4
A method of making a cold shield for an infrared detector array, wherein the array consists of a plurality of detectors and connecting leads on one side of a substrate, wherein the method includes the steps of:
- (a) coating said detectors, said leads, and one side of said substrate with a thin subcoat;
- (b) depositing a relatively thin metal layer on said subcoat;
- (c) electroplating a relatively thick metal on said thin metal layer;
- (d) masking said thick metal layer in accordance with said array and etching through said thick and thin metal layers to uncover the subcoat over the detectors and at least a portion of said leads;
- and
- (e) removing the mask.
A method of making a cold shield for an infrared detector array, wherein the array consists of a plurality of detectors and connecting leads on one side of a substrate, wherein the method includes the steps of:
- (a) coating said detectors, said leads, and one side of said substrate with a thin subcoat;
- (b) depositing a relatively thin metal layer on said subcoat;
- (c) masking said thin metal layer in accordance with said array and etching through said thin metal layer to uncover the sublayer over the detectors and at least a portion of said leads;
- (d) removing the mask;
- and
- (e) electroplating a relatively thick metal layer on said thin metal layer.
Dependencies are inferred from the claim text.