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US 4,391,044 AGranted
Metrology instrument for measuring vertical profiles of integrated circuits and the like
AssigneeTencor Instruments
InventorWilliam R. Wheeler
Life of this patent
Estimating the term…
Abstract
A surface profile measuring instrument, which has a stylus supported on a linear elongated beam for linear scanning. The beam is supported by a mounting mechanism which compensates for tilt by means of a servo. The stylus is pushed and pulled along the beam for linear scans of desired length.
Claims7
A tilt compensated stylus scanner comprising,
- an elongated beam suspended in a frame, the beam supporting a housing movable along the beam,
- a stylus mounted on a lower portion of said housing for contact with a generally flat article to be scanned linearly in the direction of the beam,
- a transducer connected to said stylus for generating an electrical signal representing a step height profile of said generally flat article,
- pivoted bracket means having said frame mounted thereto for suspending said beam above the article to be scanned for tilt compensation of the beam,
- force means communicating with said bracket for compensating undesired tilt of the beam,
- drive motor means for moving said movable housing on the beam, and
- a base supporting said bracket means.
4 more elements
A tilt compensated stylus scanner comprising,
- an elongated beam suspended in a frame, the beam supporting a housing movable along the beam,
- a stylus mounted on a lower portion of said housing for contact with a generally flat article to be scanned linearly in the direction of said beam,
- a transducer connected to said stylus for generating an electrical signal representing a step height profile of said generally flat article,
- a bracket having spaced apart extensions with aligned pivots defining an axis for tilt compensation of the beam to be scanned relative to the article to be scanned, the tilt axis being perpendicular to said elongated beam, said bracket supported from a base at said pivots and having said frame mounted thereto,
- force means communicating with said bracket for compensating undesired tilt of the beam, and
- drive motor means for moving said movable housing on the beam.
3 more elements
Dependencies are inferred from the claim text.