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US 4,382,975 AGranted
Method for coating thin film alloy on a substrate utilizing inductive heating
AssigneeRockwell International Corporation
InventorAddison B. Jones
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Abstract
The invention is a thin film alloy source utilizing a supply of alloy wire selected for deposition onto a substrate. The wire is advanced through an induction heating means at a controlled rate for evaporation onto the substrate. Detection of the meniscus height or temperature of the end of the wire being evpaorated yields a control signal for operating the control wire feed mechanism for advancing the wire at a rate to provide a predetermined coating thickness.
Claims4
The method of thin film alloy deposition on a substrate, comprising the steps of:
- selecting a wire of the alloy to be deposited;
- advancing an end of said wire through an induction heater in the vicinity of the substrate to evaporate the wire alloy for deposition onto the substrate;
- detecting and monitoring said end of said wire to produce a signal indicative of the amount of wire being evaporated for deposition;
- using said signal to control said advancing to determine the amount of deposition;
- and
- concentrating the induced heat in said end by inducing greater heat at the tip end than in the wire adjacent thereto.
3 more elements
Dependencies are inferred from the claim text.