Method for maskless chemical machining
AssigneeInternational Business Machines Corporation
InventorsRobert L. Melcher, Lubomyr T. Romankiw, Robert J. Von Gutfeld
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Abstract
A method for high resolution maskless chemical and electrochemical machining is described. Preferential etching results from exposing those regions where machining is sought to an energy beam. Such exposures can increase the etching rate in the case of electrochemical machining by a factor of 10.sup.3 to 10.sup.4. Such enhancement is sufficient to make masking unnecessary.
Claims10
A method of masklessly producing machined patterns by preferential chemical machining of regions of a surface of a workpiece comprising the following steps:
- contacting the surface with a chemical machining etching solution;
- and directing an
- energy beam having an intensity in the range from about 10.sup.2 W/cm.sup.2 to about 10.sup.6 W/cm.sup.2 onto the workpiece of sufficient intensity to heat only said regions of said surface to be machined locally with said surface in contact with said etching solution to promote enhanced etching of the surface to provide preferentially machined patterns in said regions heated by said beam where preferential machining is sought.
A method of chemically machining a surface of a workpiece preferentially, said method comprising the following steps:
- immersing said surface in a chemical machining etching solution;
- and
- directing a laser beam onto regions comprising a pattern to be formed on said workpiece to be machined, said beam having an intensity in the range from about 10.sup.2 W/cm.sup.2 to about 10.sup.6 W/cm.sup.2 sufficient to locally heat regions of the surface in a pattern and to promote enhanced etching of the surface in the pattern formed by said regions where preferential machining is sought.
A method for masklessly producing machined patterns by preferential chemical machining of regions of a surface by contacting the surface with a chemical machining etching solution, the improvement comprising:
- directing a light beam onto said regions of said surface while said surface is in contact with said etching solution, said light beam having an intensity of greater than about 10.sup.2 W/cm.sup.2 to heat only said regions of said surface to provide preferentially machined patterns to be machined by said solution in order to increase the etching rate in said regions heated by said beam where preferential machining is sought.
A method for chemical machining regions of a surface by contacting the surface with a chemical machining etching solution, the improvement comprising:
- immersing said surface in said etching solution, directing onto regions of said surface a light beam having an intensity of greater than about 10.sup.2 W/cm.sup.2, said regions comprising a pattern to be formed on said surface to be machined said light beam serving to heat the said pattern of regions of said surface to be machined to increase the etching rate of said surface in said regions to provide preferentially machined patterns.
Dependencies are inferred from the claim text.