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US 4,378,583 AGranted
Xenon flash lamp shield
AssigneeRCA Corporation
InventorFausto Caprari
Life of this patent
Estimating the term…
Abstract
The flash lamp shield is used with helical xenon flash lamps to shield the radiation from high current density regions adjacent the anode and cathode of the flash lamp. The inventor has found that helical xenon flash lamps including the shield are particularly effective in exposure systems to expose photoresist materials used in semiconductor manufacturing processes.
Claims2
An improved optical system comprising:
- a helical xenon tubular flash lamp;
- said lamp having a cathode and anode at respective ends of the tubular lamp at which ends respectively very high current density light spots exist;
- a mirror positioned to reflect light from said lamp back to said lamp to thereby enhance the light from said lamp;
- and
- means for allowing the light of the helical portion of the flash lamp to be transmitted in a direction opposite from the position of said mirror while blocking the light output from the high current density spots of said flash lamp adjacent to the anode and the cathode;
- said means comprising an opaque shield having a non-reflecting surface facing said lamp and said mirror whereby said high density light spots are not transmitted in said opposite direction with light from said helical portion.
3 more elements
Dependencies are inferred from the claim text.