Back to results
US 4,378,510 AGranted
Miniaturized accelerometer with piezoelectric FET
AssigneeMotorola, Inc.
InventorCharles E. Bennett
Life of this patent
Estimating the term…
Abstract
An accelerometer comprising a piezoelectric device hard mounted to the gate electrode of a field effect transistor, thus avoiding the capacitance of an interconnecting coaxial cable connection and providing, therefore, improved frequency response in a smaller, more efficient package.
Claims2
An accelerometer comprising:
- a metal-oxide-semiconductor field-effect-transistor having a substrate, a source, a drain and an insulated gate;
- said gate further comprising piezoelectric means mounted thereon for sensing at least one of positive and negative acceleration, said piezoelectric means having a thickness being substantially greater than a thickness of said substrate.
Dependencies are inferred from the claim text.