US 4,378,189 AGranted

Wafer loading device

AssigneeDainippon Screen Mfg. Co., Ltd.

InventorsOsamu Takeshita, Takeshi Takada

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Abstract

An apparatus to mount wafers for sublimation plating on a rotary type wafer holding dome having more than one wafer mounting seat of window type on its circumference comprising a wafer cassette that holds many sheets of wafers piled up with spacing and holding pieces in-between and is driven up-and-down at the same intervals as wafer mounting, a rotary arm having a sucker on the top end with the said wafer mounting seats on its rotation locus, and a conveyor mechanism to receive a piece of wafer at the end of the wafer cassette and to transfer the wafer to a position on the other rotation locus at the top end of the said rotary arm. The rotation of the wafer holding dome at the same intervals as the wafer mounting seats, up-down motion of the said wafer cassette, the conveyor mechanism and also the rotational driving of the rotary arm are controlled by interlocked sequence to enable automatic and effective loading and unloading between the wafer cassette and wafer holding dome without any contamination or damage to the wafers.

Claims4

Dependent claims

An apparatus for mounting wafers to be treated for sublimation plating respectively in order onto a plurality of wafer mounting seats, including a wafer cassette for storing said wafers therein, said cassette being driven vertically at the same intervals as wafer mounting;

a rotary arm for mounting said wafers one by one on the mounting seats;
a conveyor mechanism for conveying said wafers to a rotation locus of said rotary arm, said conveyor mechanism having two belts stretched between said cassette and said rotation locus;
and wafer holding means for holding said wafers at said mounting seats which are provided thereon, said holding means comprising a circular dome on which said mounting seats are circularly aligned in at least two rings and a center shaft connected to said dome at the center thereof to rotate said dome, said shaft being driven for up and down movement, horizontal movement, and inclination thereof depending on what ring a mounting seat that receives a wafer belongs to, and said shaft indexing mounting positions depending on how many mounting seats are provided in a ring, so that respective mounting seats are kept horizontal at a mounting position of said wafers.

Dependencies are inferred from the claim text.