Process for producing vacuum deposition films
AssigneeFuji Photo Film Co., Ltd.
InventorsSatoshi Yoshida, Hideaki Takeuchi, Masamichi Shigyo, Toshio Iijima, Tomoaki Ikeda
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AssigneeFuji Photo Film Co., Ltd.
InventorsSatoshi Yoshida, Hideaki Takeuchi, Masamichi Shigyo, Toshio Iijima, Tomoaki Ikeda
Estimating the term…
In a process for producing vacuum deposition films which comprises providing a vacuum deposition film composed of an alloy or an intermetallic compound of two or more components having different vapor pressures at a specified temperature on a base, the improvement which comprises charging the component having the lower vapor pressure at said temperature to an evaporation source in a vacuum evaporation chamber in such an amount that the evaporation amount thereof per unit time does not substantially vary, and carrying out vacuum evaporation while continuously feeding a component having a higher vapor pressure at said temperature into said evaporation source in an amount corresponding to the evaporation amount thereof per unit time.
In a process for producing vacuum deposition films which comprises providing a vacuum deposition film composed of an alloy or an intermetallic compound of two or more components having different vapor pressures at a specified temperature on a base, the improvement which comprises charging the component having the lower vapor pressure at said temperature to an evaporation source in a vacuum evaporation chamber in such an amount that the evaporation amount thereof per unit time does not substantially vary, and carrying out vacuum evaporation while continuously feeding a component having a higher vapor pressure at said temperature into said evaporation source in an amount such that said components in said evaporation source maintain a definite composition thereby to obtain a definite composition of said deposited film.
Dependencies are inferred from the claim text.