Projection aligner with bending mirror
AssigneeComputervision Corporation
InventorsW. Thomas Novak, David W. Volmer
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Abstract
A projection aligner is provided wherein the image position can be shifted by employing a bending mirror which makes a slight change in the magnification.
Claims6
In an optical projection device wherein the image of a mask or the like is projected through a narrow slit extending from one side of the mask to the other onto another surface the image moving at right angles to the slit to expose the entire mask, said device including at least one mirror reflecting the image of the mask onto said surface the improvement comprising means for anamorphically distorting said mirror whereby the size of the image lengthwise of said slit can be altered.
Dependencies are inferred from the claim text.