US 4,374,911 AGranted

Photo method of making tri-level density photomask

AssigneeInternational Business Machines Corporation

InventorPhillip A. Hartley

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Abstract

A method of fabricating a photomask having at least three distinct zones of light transmissibility is disclosed. A first mask is made from a predetermined pattern, this mask having only two distinct zones of light transmissibility. A second mask, made by contact printing of a diazo film, is formed from a selected portion of one zone of the original pattern, which zone has the greater light transmissibility. The second mask, being a contact print, is the photographic opposite of the first. The two masks are then aligned with the selected portion of the second mask superimposed over its original location in the first mask and a composite latent image thereof is formed in a suitable emulsion. This composite image is then developed and fixed on an appropriate support to form a photomask having at least three density zones.

Claims2

Dependent claims

A method of fabricating a patterned photomask having at least three zones of differing light transmissibility by the steps of:

(a) forming a first mask from a predetermined pattern, said first mask having only two zones of differing light transmissibility when formed;
(b) forming a temporary mask from a selected portion of the zone of said pattern having the greater light transmissibility;
(c) forming a second mask by printing the photographic equivalent of said temporary mask on diazo film which blocks the transmission of ultraviolet light, said second mask being the photographic opposite of said first mask;
(d) aligning said first and second masks so that said selected portion of said second mask is superimposed over its own location in said first mask;
(e) forming a composite latent image of said aligned first and second masks by projecting light therethrough onto a suitable photographic emulsion;
and
(f) developing and fixing said composite latent image to form said patterned photomask.

4 more elements

Dependencies are inferred from the claim text.