Method of growing epitaxial layers from a liquid phase
AssigneeMax-Planck-Gesellschaft zur Forderung der Wissenschaften e.V.
InventorsElisabeth Bauser, Martina Frik, Karl S. Lochner, Laurenz Schmidt
Life of this patent
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Abstract
A rotary head is provided with supply chambers near the center of rotation ommunicating with slot-like channels extending radially to a surrounding annular space. Substrates are set into holders, such as dovetail guides in the channel walls to expose surfaces to the liquid that flows by through the channels from the supply chambers when the head is set into rotation. The used liquid, after it reaches the annular space, flows down into a catch basin at the bottom of a surrounding casing, which casing also has an opening at the top for loading the supply chambers.
Claims7
Method of economically producing, with high regularity, a layer on at least one substrate by epitaxial growth, comprising the steps of:
- dispersing a layer-forming material in a liquid and providing a predetermined quantity of said liquid containing the layer-forming material in a supply chamber;
- forcing the liquid containing the layer-forming material, under the influence of forces externally applied to said liquid, from said supply chamber into at least one gap-like channel on a wall of which said substrate is firmly held;
- and
- causing epitaxial crystal growth to take place on said substrate only while said predetermined quantity of liquid containing the layer-forming material flows continuously and uniformly along said substrate until said supply chamber is empty, said liquid being caused to flow under the influence of said externally applied forces from said supply chamber outward as a substantially unidirectional stream, under pressure from opposition to said forces produced by confinement of said liquid by the gaplike configuration of said channel along and past the surface of said substrate at a rate controllable by said applied forces while under more than atmospheric pressure, and out of said channel to a drain chamber.
Dependencies are inferred from the claim text.