US 4,364,707 A · Object transport apparatus

Abstract

This disclosure relates to an object transport apparatus particularly useful for the high speed handling of semiconductor chips. Transport is achieved by driving a vacuum pickup, through a rotational motion toward an object resting at a first reference location while simultaneously driving a cam, restraining a spring loaded cam follower, so that the vacuum pickup is positioned proximal to the first reference position. Vacuum is applied to secure the object to the pickup. The cam and shaft are then simultaneously driven in the opposite direction to clear the other objects and obstruction by swinging the object through an arcuate motion while simultaneously elevating the object. As the pickup and object continue through the arcuate motion, the cam motion is reversed to position the object proximal to a deposition surface located at a second reference position. The cam is then further driven to contact the object with the deposition surface, the vacuum is released and the object is released. The cam is then driven down to allow the pickup to avoid interference with the released object or other obstructions and both the cam drive and shaft drive return the pickup to an index position, readying the apparatus for another cycle. All motions and operations are controlled by a controller.

Claims10

Dependent claims

An object transport apparatus for conveying at least one object from a first reference surface position to a second reference surface position, comprising:

pickup means having a pickup surface for releasably engaging said object;
said pickup means including an elongated arm member;
said pickup surface defining at least a vacuum orifice;
said pickup means further having a selectively operable vacuum source open to said vacuum orifice;
transport means cooperatively connected to said pickup means for swinging said pickup surface from said first reference position through an arcuate path having an independently selectively variable range of elevations to said second reference position;
said transport means having a frame;
said transport means further having a shaft rotatably supported about an axis by said frame for rotating said arm in a reversible angular motion over an arcuate range;
said transport means including pivot means for pivotally engaging said arm to said shaft;
said transport means yet further comprising cam means supported by said frame for pivoting said arm in a reversible pivotal motion about said pivot means over a pivotal range;
said arm having a cam follower surface for contacting at least a portion of said cam means;
and
said cam follower surface having symmetry about said shaft axis so that said cam means can independently deflect said pickup surface to any elevation position of said arm within said arcuate range.

9 more elements

An object transport apparatus for conveying at least one object from a first reference surface position to a second reference surface position, comprising:

pickup means having an upper and a lower vertical travel limit for releasably engaging said object;
transport means cooperatively connected to said pickup means for selecting any desired path of travel from said first reference position through an arcuate motion having an independently variable range of elevations equal to said vertical travel limits of said pickup means to said second reference position.
said pickup means including an elongated arm member having opposed first and second ends;
said pickup means further including a pickup surface located near said first end of said arm having at least a vacuum orifice defined by said pickup surface coupled to a selectively operable vacuum source;
said transport means comprising a frame;
said transport means further comprising rotation means supported by said frame, having pivot means for engaging said arm between said ends, for rotating said pivot means and said arm in a reversible angular motion over an arcuate range;
said transport means yet further comprising cam means supported by said frame for pivoting said arm in a reversible pivotal motion about said plurality of pivots over a pivotal range;
said arm has a cam follower surface for contacting at least a portion of said cam means;
said pivot means comprising a pair of pivots;
said rotation means comprising a shaft yoke engaging said pivots;
said rotation means further comprising a shaft having an axis rotatably mounted to said frame and coupled to said shaft yoke;
said rotation means having a driven sprocket coupled to said shaft;
said rotation means including a cogged belt engaging said driven sprocket;
said rotation means provided with a driver sprocket engaging said cogged belt at a point remote from said driven sprocket;
said rotation means further comprising a rotation motor having a rotation motor shaft coupled to said driver sprocket and supported by said frame;
said rotation motor comprising a stepping-type electrical motor;
said pickup means further comprising said arm having an arm vacuum passage open to said vacuum orifice, and a flexible vacuum hose open to said arm vacuum passage and coupled to said arm and to said yoke;
said pickup means including said shaft yoke and said shaft having a common shaft vacuum passage open to said flexible vacuum hose and coupled to said selectively operable vacuum source;
and
said cam follower surface has symmetry about said shaft axis.

17 more elements

Dependencies are inferred from the claim text.

Object transport apparatus

Life of this patent

Object transport apparatus

Life of this patent

Abstract

Claims10