US 4,362,389 AGranted

Method and apparatus for projection type mask alignment

AssigneeHitachi, Ltd.

InventorsMituyoshi Koizumi, Nobuyuki Akiyama, Yoshimasa Oshima

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Abstract

A mask alignment method of the projection type is disclosed which is based upon a fact that the exit pupil of a projection lens is actually positioned at a finite distance, and wherein a first wafer alignment pattern including a line segment and a second wafer alignment pattern including another line segment are formed on a wafer in those radial directions from the optical axis of a projection lens which intersect with each other approximately at a right angle. A first mask alignment pattern including a line segment and a second mask alignment pattern including another line segment are formed respectively at those positions on a mask which optically correspond to respective positions of the first and second wafer alignment patterns through the projection lens. The optical image of the first wafer alignment pattern superposed on the optical image of the first mask alignment pattern by the action of the projection lens falls on an image pickup device or element, the optical image of the second wafer alignment pattern superposed on the optical image of the second mask alignment pattern by the action of the projection lens falls on another image pickup device or element, the relative displacement between the wafer and the mask is determined by the video signals delivered from the image pickup devices or elements, and the wafer and the mask are aligned with each other so as to reduce the relative displacement to zero.

Claims7

Dependent claims

A mask alignment method of projection type comprising the steps of:

disposing a wafer in a region onto which a mask is projected by a projection lens, said wafer including first and second wafer alignment patterns formed thereon, said first wafer alignment pattern having at least a first line segment, said first line segment being formed at a first position on said wafer and having a predetermined length in a first direction with first and second step edges extending parallel to one another along said predetermined length, said second wafer alignment pattern having at least another first line segment, said another first line segment being formed at a second position different than said first position on said wafer and having a predetermined length in a second direction approximately perpendicular to said first direction with said first and second step edges extending parallel to one another along said predetermined length, said first and second wafer alignment patterns having respective pattern center axes, said pattern center axes being approximately parallel to said first and second line segments, respectively, said first and second positions being determined so as to cause directions along which each of said pattern center axes lies to intersect with the optical axis of said projection lens;
projecting first and second mask alignment patterns of said mask onto said first and second wafer alignment patterns, respectively, said first and second mask alignment patterns being laid respectively upon said first and second wafer alignment patterns when said mask is projected onto said wafer by said projection lens, each of said first and second mask alignment patterns including at least a second line segment having a predetermined length, said first and second mask alignment patterns being formed at such positions on said mask as to make each of said second line segments parallel to a corresponding one of said first line segments when said mask is correctly aligned with said wafer;
and
aligning said mask and said wafer with each other by the use of optical images of said first and second wafer alignment patterns and said first and second mask alignment patterns, said optical images being formed and converted into video signals, a relative displacement between each of said first line segments and a corresponding one of said second line segments being determined by a video signal corresponding to said first line segment and a video signal corresponding to said second line segment, said relative displacement being reduced to align said wafer with said mask,
wherein, during the course of said adjusting, equal amounts of said projected light will be reflected off the first and second step edges of each of said first and second wafer alignment patterns due to the positional relationship of the longitudinal center axes of the first and second wafer alignment patterns to the optical axis of the projection lens.

2 more elements

A method for alignment of a wafer with a mask using light-projection through a projection lens, said wafer including a plurality of exposure sections, each including predetermined circuit patterns, said method comprising the steps of:

preliminarily forming on each of said exposure sections of said wafer at least first and second wafer alignment patterns each including at least one longitudinal mark at the periphery of the circuit patterns included therein, each said longitudinal mark including first and second step edges extending parallel to one another along the length of said longitudinal mark, and forming on the mask first and second mask alignment patterns, said first and second wafer alignment patterns and said first and second mask alignment patterns being formed in such a positional relationship that when said wafer is disposed at a predetermined region in the path of the light projection, longitudinal center axes of said first and second wafer alignment patterns extend substantially towards the optical axis of said projection lens, and that when said wafer is positioned in alignment with said mask, longitudinal center axes of optical images of said first and second wafer alignment patterns projected on said mask through said projection lens are aligned with the longitudinal center axes of said first and second mask alignment patterns, respectively,
disposing the wafer in said predetermined region;
projecting a light through said mask and said projection lens onto said wafer thereby forming optical images of said first and second mask alignment patterns on said wafer;
producing electrical signals representative of positional relationships between said first wafer alignment pattern and said first mask alignment pattern and that beween said second wafer alignment pattern and said second mask alignment pattern;
and
adjusting the position of said wafer relative to the position of said mask so as to change said electrical signals towards predetermined conditions which exist when the longitudinal center axes of said first and second mask alignment patterns are aligned with each other, respectively, wherein, during the course of said adjusting, equal aamounts of said projected light will be reflected off the first and second step edges of each of said first and second wafer alignment patterns due to the positional relationship of the longitudinal center axes of the first and second wafer alignment patterns to the optical axis of the projection lens.

3 more elements

A mask alignment apparatus of projection type comprising:

a wafer-feeding table for carrying a wafer, said wafer being provided with wafer alignment patterns formed in at least two portions on said wafer, said wafer alignment patterns including line segments, respectively, said line segments being arranged radially with respect to the optical axis of a projection lens, the perpendicular from one of said wafer alignment patterns to said optical axis making an angle approximately equal to 90.degree. with respect to the perpendicular from the other wafer alignment pattern to said optical axis, wherein each of said line segments includes first and second step edges extending parallel to one another along the length of said line segment;
a mask-feeding table disposed above said wafer-feeding table for carrying a mask, said mask being provided with mask alignment patterns formed in at least two portions on said mask and with a circuit pattern formed on said mask, said mask alignment patterns including line segments, respectively, the positions of said mask alignment patterns optically corresponding to the positions of said wafer alignment patterns through said projection lens, respectively;
said projection lens being disposed between said wafer-feeding table and said mask-feeding table for projecting said patterns formed on said mask onto said wafer;
a plurality of units for scanning and detecting each of at least two optical images of said alignment patterns, one of said optical images corresponding to said first wafer alignment pattern and said first mask alignment pattern, the other optical image corresponding to said second wafer alignment pattern and said second mask alignment pattern, said optical images being converted into video signals by image pickup devices incorporated in said units;
means for causing said wafer-feeding table to conduct step and repeat movements in accordance with a pitch of chips contained in said wafer;
and
displacement detecting means for detecting the relative displacement in the directions of X and Y axes between said wafer and said mask on the basis of said video signals delivered from said image pickup devices, said relative displacement being detected for at least three alignment patterns by operating said means for causing said wafer-feeding table to conduct step and repeat movements, said mask-feeding table and said wafer-feeding table being relatively moved on the basis of said relative displacement detected by said displacement detecting means to align said wafer and said mask with each other,
wherein, during the course of said adjusting, equal amounts of said projected light will be reflected off the first and second step edges of each of said wafer alignment patterns due to the positional relationship of the longitudinal center axes of the wafer alignment patterns to the optical axis of the projection lens.

5 more elements

Dependencies are inferred from the claim text.