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US 4,362,384 AGranted
Means for providing uniform illumination to a light sensitive element
AssigneeThe Perkin-Elmer Corporation
InventorsOrest Engelbrecht, David A. Markle
Life of this patent
Estimating the term…
Abstract
In a ring field projection optical system for imaging a mask on a wafer the illumination source has readily adjustable means for obtaining uniform exposure along the length of the arcuate zone of illumination.
Claims4
Means for controlling the transmission of light from a light source to a mask for reproducing an image comprising;
- a plate member having an elongated curved slit opening disposed between said light source and said element,
- a flexible band secured to said plate member and extending along said slit opening, said flexible band disposed perpendicular to said plate member to obstruct light from said light source from passing through said slit opening,
- a plurality of sets of adjustment elements connected between spaced areas on said flexible band and said plate member to permit independent flexure of said flexible band at selected points to vary the degree of the slit opening along its length,
- said plurality of sets of adjustment elements comprising a plurality of flexible strips secured between said flexible band and a plurality of brackets pivotally mounted to said plate member, a plurality of flexible cables connected to move said brackets and thereby said flexible band, and manual control elements for selectively adjusting said flexible cables thereby controlling the effective width of said slit opening along the length thereof.
1 more element
Dependencies are inferred from the claim text.