Enhancement of resist development
AssigneeInternational Business Machines Corporation
InventorsJames A. Carothers, James Economy, Augustus C. Ouano
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Abstract
The present invention is concerned with enhancement of resist development. In particular it is concerned with obtaining high solubility rate ratio between the exposed and the unexposed regions of a resist and also obtaining shorter development time. These objectives are achieved by treating the resist with a liquid trialkylamine having from two to eight carbon atoms in each alkyl group.
Claims5
A process for increasing the solubility rate ratio of a quinone-diazo or quinone-triazo sensitized phenolic-aldehyde resist, said process comprising contacting the resist under anhydrous conditions either before or after the resist has been subjected to imagewise exposure to radiation with an anhydrous trialkylamine which is in the liquid state and which contains from two to eight carbon atoms in each alkyl group, and then contacting said resist with an aqueous alkaline developer to dissolve the exposed regions.
Dependencies are inferred from the claim text.