Method of making a solid-state color imaging device having a color filter array using a photocrosslinkable barrier
AssigneeEastman Kodak Company
InventorSusan E. Hartman
Life of this patent
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Abstract
A color filter array for a solid-state imaging device is disclosed. The color filter array is of the "wash-off" type wherein the individual filter elements are formed by dyeing tiny islands of a dyeable composition. As a barrier layer, the color filter array of the present disclosure uses a photocrosslinkable dye-impermeable polymer. The barrier is coated over a set of filter elements. A method of making the described solid-state device is also disclosed.
Claims6
A method of making a solid-state color imaging device comprising a support having a surface comprising solid-state radiation-sensitive elements and bonding pad areas and, superimposed on said radiation-sensitive elements, in microregistration, a color filter array having at least three sets of elements, said method comprising the steps of:
- (1) forming a layer of a radiation-sensitive, dyeable composition on said surface;
- (2) exposing and developing said radiation-sensitive dyeable layer so as to form a set of islands superimposed on some of said solid-state radiation-sensitive elements, said islands having an area less than about 1.0.times.10.sup.-8 m.sup.2 ;
- (3) dyeing said islands formed in step (2) by contacting them with a solution comprising a solvent and a dye, thereby forming a set of filter elements;
- (4) overall coating said dyed islands and the remainder of said surface with a layer of a photocrosslinkable, dye-impermeable polymer;
- (5) exposing said photocrosslinkable, dye-impermeable polymer layer so as to crosslink said polymer at least in those areas corresponding to said islands, leaving unexposed those areas corresponding to said bonding pad areas;
- (6) developing said photocrosslinkable, dye-impermeable polymer layer so as to remove said polymer from said bonding pad areas;
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- (7) repeating steps (1) through (6) and then steps (1) through (3) using a different exposure in each step (2) and a different dye in each step (3) so as to produce second and third sets of filter elements.
A method of making a solid-state color imaging device comprising a support having a surface comprising radiation-sensitive elements and bonding pad areas and, superimposed on said radiation-sensitive elements, in microregistration, a color filter array having at least three sets of filter elements, said method comprising the steps of:
- (1) forming a layer of a radiation-sensitive, dyeable composition on said surface;
- (2) exposing and developing said radiation-sensitive dyeable layer so as to form islands superimposed on some of said radiation-sensitive elements, said islands having an area less than about 1.0.times.10.sup.-8 m.sup.2 ;
- (3) dyeing said islands formed in step (2) by contacting them with a solution comprising a solvent and a dye, thereby forming a set of filter elements;
- (4) overall coating said dyed islands and the remainder of said surface with a layer of a photocrosslinkable, dye-impermeable polymer;
- (5) forming a layer of a radiation-sensitive dyeable composition;
- (6) exposing and developing said radiation-sensitive dyeable layer so as to form islands on some of said radiation-sensitive elements, said islands having an area less than about 1.0.times.10.sup.-8 m.sup.2, said exposure being sufficient to crosslink any photocrosslinkable polymer which underlies said islands;
- (7) dyeing said islands formed in the previous step by contacting them with a solution comprising a solvent and a dye, thereby forming a second set of filter elements;
- (8) repeating steps (4) through (7) so as to produce a third set of filter elements;
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- (9) developing said photocrosslinkable, dye-impermeable polymer so as to remove said polymer in those areas where said polymer was not crosslinked.
Dependencies are inferred from the claim text.