Positive radiation sensitive resist terpolymers
AssigneeRCA Corporation
InventorsThomas R. Pampalone, Kurt B. Kilichowski
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Abstract
This invention relates to novel terpolymers of 3-methylcyclopentene, an omega alkynoic acid and sulfur dioxide. Positive radiation sensitive films prepared from the subject terpolymers adhere well to the substrate, demonstrate resistance to cracking and erosion during development and possess excellent edge definition.
Claims8
A method of forming a patterned layer on a substrate comprising:
- (a) coating the subject with a composition comprising a terpolymer comprising an organic monomer component and sulfur dioxide in a 1:1 molar ratio, said monomer component being comprised of 3-methylcyclopentene, and an omega alkynoic acid represented by the formula
- CH.tbd.C--(CH.sub.2).sub.n --COOH
- wherein n is an integer from 1 to 20, and a suitable solvent therefor;
- (b) drying said coating to form a positive recording medium;
- (c) irradiating selected portions of said medium and
- (d) developing the irradiated portions of said medium with a suitable developer.
A positive recording medium comprising a substrate and a radiation sensitive film applied to a surface of the substrate, said film comprised of a terpolymer comprising an organic monomer component and sulfur dioxide in a 1:1 molar ratio, said monomer component being comprised of 3-methylcyclopentene, and an omega alkynoic acid represented by the formula
- CH.tbd.C--(CH.sub.2).sub.n --COOH
- wherein n is an integer from 1 to 20.
Dependencies are inferred from the claim text.