Humidity sensor element
AssigneeChichibu Cement Co., Ltd.
InventorsGiichi Sudoh, Keiichi Minegishi, Tokuji Akiba, Tadao Kato, Norio Ogawa
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Abstract
A humidity sensor element comprising a metal oxide semiconductor sintered member having a composition composed of TiO.sub.2 and V.sub.2 O.sub.5, the member being formed with a pair of electrodes. When the element is used at a temperature of less than 400.degree. C., it is possible to detect the humidity as a variation of electric resistance.
Claims2
A humidity sensor element comprising a metal oxide semiconductor sintered member composed of a composition of TiO.sub.2 as a principal material and containing 0.1 to 10 mole % of V.sub.2 O.sub.5, said member being provided with electrodes.
Dependencies are inferred from the claim text.