Process for depositing on substrates, by cathode sputtering, a self-lubricating coating of metal chalcogenides and the coating obtained by this process
AssigneeBattelle Memorial Institute
InventorsErich Bergmann, Georges Melet
Life of this patent
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Abstract
A metal chalcogenide coating, in particular of molybdenum sulphide, is deposited on a substrate by high speed cathode sputtering. This coating is turbostratic and has an unusually high resistance to wear produced by frictional forces.
Claims12
In a process for depositing, by cathode sputtering, a self-lubricating coating of a metal chalcogenide, according to which a target of the material to be sputtered, comprising a chalcogenide or a mixture of chalcogenides, is bombarded with ions formed by a cathode discharge produced in the immediate vicinity of the said target and in a rare gas atmosphere, the materials thus expelled from the target being deposited on a substrate placed opposite the said target, the improvement wherein the cathode space of the said target is subjected to a magnetic field, the distance between the target and the said substrate is adjusted so that it corresponds approximately to the mean free path of the molecules expelled from the target, and the sputtering current density is such that the rate of deposition of the surface of the substrate opposite the said target is at least 0.1 .mu.m/minute, under conditions so as to form turbostratic deposits on the substrate.
An article comprising a substrate and a self-lubricating coating of a metal chalcogenide of turbostratic structure and long durability when subjected to dry friction.
Dependencies are inferred from the claim text.