Method for preventing corrosion of Al and Al alloys
AssigneeHitachi, Ltd.
InventorsShinya Iida, Kazuyoshi Ueki, Tatsumi Mizutani, Hideo Komatsu, Kado Hirobe
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Abstract
Disclosed is a method for preventing corrosion of Al and Al alloys processed by the dry-etching method, which comprises (i) the step of sputtering Al or Al alloy in an ammonia-containing atmosphere and (ii) the step of washing the sputtered Al or Al alloy with an alkaline aqueous solution and then with water after termination of the step (i). According to this method, corrosion of Al or Al alloy by halogen element-containing substances stuck to Al or Al alloy during the dry-etching treatment can be effectively prevented.
Claims14
A method for preventing corrosion of Al and Al alloys, which comprises (i) the step of sputtering Al or Al alloy in an atmosphere containing ammonia and (ii) the step of washing the Al or Al alloy with a liquid after termination of the step (i).
Dependencies are inferred from the claim text.