Method for regulating the evaporation rate of oxidizable substances in reactive vacuum deposition
AssigneeLeybold-Heraeus GmbH
InventorsKlaus-Jurgen Heimbach, Walter Zultzke
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Abstract
A process for regulating the evaporation rate of oxidizable substances in reactive vacuum deposition by the metered addition of oxygen to a vacuum deposition chamber during deposition, wherein the addition of oxygen to a predetermined value, the pressure "p" in the vacuum chamber is measured, and the evaporation rate "r" for any pressure changes is regulated such that the ratio of pressure to evaporation rate p:r is maintained substantially constant.
Claims5
In a process for regulating the evaporation rate of oxidisable substances in reactive vacuum deposition by the metered addition of oxygen to a vacuum deposition chamber during deposition, the improvement comprising:
- adjusting the addition of oxygen to a predetermined value, measuring the pressure in the vacuum chamber, and regulating the evaporation rate for any pressure changes such that the ratio of pressure to evaporation rate is maintained substantially constant.
Dependencies are inferred from the claim text.