Liquid phase epitaxial process for magnetic garnet
AssigneeTexas Instruments Incorporated
InventorsRodney A. Roques, Gene F. Wakefield
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Abstract
The liquid phase epitaxial growth of a magnetic garnet film is obtained by providing a circulating flux solution of the material, wherein spaced apart zones are maintained at different temperatures, above and below the saturation point; and by placing a preheated substrate in contact with the supersaturated zone, wherein a suitable growth temperature is maintained. This system avoids the prior need for heating and cooling the entire solution as a single, thermally uniform zone, and thereby achieves a substantial savings in time which permits at least a ten-fold increase in production rates, without increasing manpower or capital investment.
Claims3
A method for the liquid phase epitaxial growth of a crystalline magnetic garnet material on a suitable substrate comprising the steps of:
- (a) providing a circulating P.sub.b O--B.sub.2 O.sub.3 flux solution of a magnetic garnet;
- (b) selectively controlling the temperature within separated zones of said solution to provide a first zone maintained at a temperature higher than the saturation point;
- and a second zone remote from said first zone, maintained at a temperature below the saturation point;
- and third and fourth intermediate zones wherein said solution is circulated, while cooling, from said first zone to said second zone, and is returned from said second zone to said first zone at increasing temperatures, respectively, each of said zones having a common surface level;
- (c) preheating the substrate to a suitable growth temperature;
- (d) and placing a surface thereof in contact with the surface of said second zone for a time sufficient to deposit an epitaxial layer of said solute material thereon.
Dependencies are inferred from the claim text.