Thermistor
AssigneeMatsushita Electric Industrial Co., Ltd.
InventorsTsuneo Mitsuyu, Kiyotaka Wasa, Shigeru Hayakawa
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Abstract
A high performance, precision thermistor comprising a temperature sensitive resistor in the form of a thin, uniform layer of silicon carbide, deposited on a base support by sputtering, and electrode means attached to the temperature sensitive resistor in electrically connected relation to the temperature sensitive resistor.
Claims14
A thermistor comprising a base support, a temperature sensitive resistance layer of silicon carbide applied by sputtering deposition on one surface of said base support, and electrode means electrically connected to said temperature sensitive resistance layer of silicon carbide.
Dependencies are inferred from the claim text.