Apparatus for manufacturing multi-layered semiconductor elements by means of liquid-phase epitaxy
AssigneeInternational Business Machines Corporation
InventorsDieter W. Pohl, Hansjoerg Scheel
Life of this patent
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Abstract
In a crucible or reactor for making multi-layered semiconductor devices by means of liquid-phase epitaxy, different supersaturated solutions are brought into contact with semiconductor substrates for short times. Transport of the solutions occurs by alternating acceleration. Either gravity alternates with centrifugal force, or a positive rotational acceleration alternates with a negative one. Chambers within the reactor are interconnected by channels so that the alternating forces acting upon the solutions cause these to flow in a preferred direction without mixing with each other.
Claims12
Apparatus for transfer of liquids between chambers of a reactor comprising:
- a plurality of interconnected discrete reactor chambers circumferentially spaced on a common horizontal plane, with said chambers defining an annular array disposed about a vertical axis, with said interconnection comprising
- conduit means extending between the bottom of one of said chambers and the top of a succeeding and adjacent second one of said chambers;
- and
- means to rotate said chambers about said axis under sufficient speed to force a liquid to flow under centrifugal force through said conduit means from the bottom of said one chamber means to the top and into said second one of said succeeding chambers.
Apparatus for transfer of liquids between chambers of a reactor, comprising:
- (A) a first plurality of interconnected discrete reactor chambers circumferentially spaced on a first common horizontal plane at a first level and defining a first annular array disposed about a vertical axis;
- (B) a second plurality of interconnected discrete reactor chambers circumferentially spaced on a second common horizontal plane defining a second annular array of a plurality of discrete chambers disposed
- (a) radially between said first array and said axis, and
- (b) at a second level below that of said first array;
- (C) conduit means sequentially interconnecting in a direction of rotation about the vertical axis
- (a) the bottom of a first chamber in said second array to the top of an adjacent chamber in said first array, and
- (b) the bottom of said adjacent chamber of said first array to the top of the next succeeding adjacent chamber in said second array;
- and
- (D) means to simultaneously rotate said chambers of said first array and said second array about said axis under sufficient speed to force a liquid to flow under centrifugal force through said conduit means from the bottom of the said first chamber in said second lower level array to the top of the said adjacent chamber in said first level array.
Dependencies are inferred from the claim text.