Effusion cells for molecular beam epitaxy apparatus
AssigneeBell Telephone Laboratories, Incorporated
InventorAlfred Y. Cho
Life of this patent
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Abstract
The effusion cell for molecular beam epitaxy apparatus consists of a pyrolytic BN cylindrical crucible surrounded by a heating coil. The position of the heating coil is maintained by a plurality of ceramic rods extending parallel to the cylinder axis with notches along their length for engaging the heating coil. The ceramic rods are secured by a retaining ring near the front of the crucible and an apertured disk near the back of the crucible. The entire assembly is surrounded by a foil heat shield.
Claims1
A molecular beam epitaxy apparatus comprising an evacuated growth chamber and at least one improved effusion cell for generating a molecular beam from a source material, said improved effusion cell comprising:
- an elongated cylindrical Pyrolytic Boron Nitride crucible having an opening at one end thereof to permit egress of said beam,
- a heating coil surrounding and in heat transfer relationship with said crucible,
- a plurality of ceramic rods, extending essentially parallel to the cylinder axis and having notches along their length, for engaging said coil and firmly pressing said coil onto the outer surface of said crucible;
- a retaining ring to secure said ceramic rods near said one end of the crucible,
- an apertured disc to secure said ceramic rods near the other end of the crucible;
- and
- a radiation heat shield surrounding the crucible, coil and rod assembly.
Dependencies are inferred from the claim text.