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US 4,233,135 AGranted
Method of fabricating piezoelectric thin film
AssigneeToko, Inc.
InventorsMitsuo Sakakura, Tetsuo Takaku
Life of this patent
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Abstract
In a method of fabricating a piezoelectric thin film of zinc oxide by means of a sputtering process, zinc and alkaline earth metal are sputtered together in an oxygen atmosphere to thereby produce zinc oxide containing the alkaline earth metal.
Claims4
A method of fabricating a piezoelectric thin film of zinc oxide by means of a sputtering process, characterized by sputtering zinc and beryllium together in an oxygen atmosphere to thereby produce a thin film of zinc oxide containing 1 to 10 atom % of beryllium.
Dependencies are inferred from the claim text.