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US 4,230,494 AGranted
Article highly resistant to corrosion by gallium phosphide and gallium arsenide
AssigneeTokyo Shibaura Denki Kabushiki Kaisha
InventorsKiyoshi Nakamura, Michiyasu Komatsu, Masae Nakanishi
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Abstract
An article has a portion contacted by gallium phosphide or gallium arsenide. At least the contacting portion is formed of a sintered body of a mixture of silicon nitride and an additive, and part or the whole of the additive is present as a crystallized phase in the sintered silicon nitride system.
Claims4
An article having at least a portion which directly contacts molten gallium phosphide or gallium arsenide, said contacting portion comprising:
- a sintered body of silicon nitride and a total of from 0.5% to 20% by weight, based on said silicon nitride, of an additive selected from the group consisting of 0.01% to 10% by weight based on said silicon nitride, of aluminum oxide, 0.5% to 20% by weight, based on said silicon nitride, of cerium oxide and mixtures thereof, said additive being in the form of a compound selected from the group consisting of Si-Ce-O-N, Si-Ce-Al-O-N and mixtures thereof depending upon the additive selected, and at least a portion of said additive being present in said sintered body as a crystallized phase.
Dependencies are inferred from the claim text.