Sequential purification and crystal growth
AssigneeMotorola, Inc.
InventorsH. Ming Liaw, Charles J. Varker
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AssigneeMotorola, Inc.
InventorsH. Ming Liaw, Charles J. Varker
Estimating the term…
A combined method for purifying silicon and growing single crystals. A multiple step process is disclosed by which metallurgical grade silicon is purified and converted into a high quality monocrystalline silicon ingot. Each of the steps in the process is designed to remove specific impurities and thus improve the electrical quality of the silicon material. First, the insoluble slag and high segregation coefficient impurities are removed. Soluble impurities are then removed by a reactive gas step, and by a liquid-liquid extraction step using reactive metallic oxides or an oxide solvent. The remaining impurities are removed by segregation during freezing by pulling an ingot from a portion of the molten metallurgical grade silicon. The ingot so formed is then used to charge a second crystal puller. One or more of the previous purifying steps can then be repeated for the charge of the second crystal puller and an ingot of improved purity can be pulled from the melt of the second puller. In like manner, third and successive reiterations of the process can be used to obtain silicon of the desired purity and crystal quality.
A process for the sequential purification and crystal growth of silicon crystals from impure silicon which comprises the steps of:
A method for removing insoluble slag from the surface of a silicon melt contained in a crucible which comprises the steps of:
A process for sequential purification and silicon crystal growth from an impure silicon charge which comprises the steps of:
A method for purifying metallurgical grade silicon which comprises:
Dependencies are inferred from the claim text.