Novel solvent drying agent
AssigneeRCA Corporation
InventorJohn R. Zuber
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Abstract
Mixtures of 1-propanol, water and certain perfluoro compounds form excellent drying agents for silicon based devices. The mixtures have good wetting properties and form azeotropic mixtures in the vapor phase.
Claims4
An azeotropic mixture of 1-propanol, water and a perfluoro compound selected from the group consisting of perfluoro-2-butyltetrahydrofuran and perfluoro-1,4-dimethylcyclohexane.
A method of drying silicon wafers which comprises rinsing said devices with water, immersing in a hot azeotropic mixture of 1-propanol, water and a perfluoro compound selected from the group consisting of perfluoro-2-butyltetrahydrofuran and perfluoro-1,4-dimethylcyclohexane and draining.
Dependencies are inferred from the claim text.