Method of preparing photodetector array elements
AssigneeHoneywell Inc.
InventorsRobert V. Lorenze, Jr., Miriam F. Young
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Abstract
A method of preparing photodetector array elements from a body of photodetector material wherein conductive layers of a metal are formed on selected portions of a substrate, the conductive layers are coated with a photoresist material, an adhesive layer is deposited on the photoresist and the remaining substrate, a body of photodetector material is bonded to the adhesive, and individual photodetector elements are delineated from the body to form the elements of the array and to expose the edges of the photoresist material, and the photoresist layer and material deposited thereon are removed.
Claims5
A method of preparing photodetector array elements from a body of photodetector material, comprising:
- forming conductive layers on selected portions of a substrate;
- coating said conductive layers with a photoresist material;
- depositing an adhesive layer on the photoresist and the remaining substrate to a sufficient depth to cover said photoresist;
- bonding a body of photodetector material to said adhesive, such that said body is parallel to said substrate;
- delineating individual photodetector elements from said body to form elements of an array, thereby exposing the edges of said photoresist material;
- and
- removing the photoresist layer and material deposited thereon.
Dependencies are inferred from the claim text.