US 4,069,009 A · Apparatus for transferring semiconductor wafers

Abstract

An apparatus for automatically transferring semiconductor wafers is disclosed. Semiconductor wafers are loaded on a boat which is placed on a pair of first supporting bars. A pair of second supporting bars are driven by a motor to repeat circular motion between the first supporting bars. The second supporting bars, circularly moving in parallel with the first supporting bars, forwardly transfer the boat. The boat is kept uplifted over the first supporting bars during the forward transfer thereof. Repetition of the circular motion of the second supporting bars makes the automatic transfer of the semiconductor wafers to be heat-treated in a semiconductor manufacturing system.

Claims10

Dependent claims

An apparatus for transferring semiconductor wafers comprising:

a boat on which semiconductor wafers are loaded;
a body having a pair of side walls;
a pair of first supporting bars, positioned in a fixed relationship with said body, for supporting said boat between said side walls;
a movable unit having a lateral width narrower than the distance between said first supporting bars;
an actuator, operatively coupled to said movable unit, for rotating said movable unit between said first supporting bars;
and
a pair of second supporting bars, positioned on said movable unit, for uplifting and transferring said boat during when said second supporting bars are kept higher than said first supporting bars.

4 more elements

Dependencies are inferred from the claim text.

Apparatus for transferring semiconductor wafers

Life of this patent

Apparatus for transferring semiconductor wafers

Life of this patent

Abstract

Claims10