Vacuum treating apparatus
AssigneeWestern Electric Company, Inc.
InventorsMarvin E. Roth, Donald J. Vallere
Life of this patent
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Abstract
A sputtering apparatus of the bell-jar type includes a high-vacuum pump disposed centrally of, and directly within a vacuum chamber of the apparatus. A separate enclosing member is disposed within the chamber and allows selective exposure of the pump to the chamber. An annular workholder is mounted in concentric surrounding relation with the pump, and an apertured, annular shutter is mounted in concentric surrounding relation with the workholder. Targets of materials to be sputter deposited on the workpieces are mounted on the inside wall of the main enclosure of the apparatus. The shutter and the workholder are moved in synchronism at the beginning and at the end of the deposition cycle to provide a uniform exposure of all the workpieces to the targets.
Claims3
A vacuum treating apparatus comprising:
- a treatment chamber;
- a first pump disposed outside the chamber in communication therewith;
- a second pump disposed centrally within said chamber;
- means for selectively isolating said second pump from a portion of said chamber;
- a work assembly, within said portion of the chamber, disposed in concentric surrounding relation with said second pump;
- and
- a treating means, within said portion of the chamber, disposed radially outwardly of said work assembly.
Dependencies are inferred from the claim text.