Hydrogen detector
AssigneeSemiconductor Sensors, Inc.
InventorsChrister Martinus Svensson, Leif Sigurd Lundkvist, Kurt Ingemar Lundstrom, Madurai Somanathan Shivaraman
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Abstract
A device for the detection of hydrogen comprising a semiconductor, a metal electrode and an insulator situated between the semiconductor and the electrode. The metal electrode is made of palladium, nickel, platinum or an alloy containing at least 20% palladium by atomic weight. In one embodiment, the device is a field-effect transistor. Means are also provided for heating the device for improving its response time.
Claims6
An improved device for detection of hydrogen in the form of hydrogen gas, atomic hydrogen or certain gaseous hydrogen compounds, including ammonia, the improvement comprising a semiconductor, a metal electrode and an insulating layer positioned intermediate said semiconductor and said electrode, said metal electrode made from palladium, nickel, platinum or an alloy containing at least 20% palladium by atomic weight.
Dependencies are inferred from the claim text.