Method for coating the photoresist onto a belt-like material comprising a perforated carrier and metallic foil
AssigneeDainippon Screen Seizo Kabushiki Kaisha
InventorsKazuo Hata, Sumio Mitani
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Abstract
A method for coating the photoresist by coating rollers onto a belt-like material comprising a perforated film carrier and a metallic foil laminated thereon. This belt-like material, which has so-called device holes or apertures punched off with a predetermined pitch and is particularly to be used for producing lead frames for IC devices, is wound around a back-up roller with its metallic foil facing outward to give a slight tension to the metallic foil. Thus, a uniform and continuous coating of the photoresist onto the foil may be obtained without any dents formed even at those device holes or apertures.
Claims6
In a method for uniformly coating a photoresist by roller coating means utilizing a back-up roller, a coating roller or the like onto a belt-like material consisting of a perforated carrier having longitudinally spaced device holes or apertures and a metallic foil laminated on said perforated carrier, said method comprising:
- winding said belt-like material around said back-up roller in such a manner that said perforated carrier directly contacts the outer surface of the back-up roller and a slight tension is produced on the metallic foil, and
- making said coating roller directly contact the surfaces of the metallic foil of the belt-like material at a portion where the belt-like material is wound around the back-up roller and thereby preventing said belt-like material from being depressed adjacent to said device holes or aperatures during the coating process.
Dependencies are inferred from the claim text.