Method for forming images by irradiation of electron rays and resist compositions utilizable therefor
AssigneeDirector-General of Agency of Industrial Science and Technology
InventorShoei Fujishige
Life of this patent
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Abstract
Syndiotactic poly(methyl methacrylate) obtained by radical polymerization mixed with isotactic poly(methyl methacrylate) obtained by anionic polymerization so that the ratio by weight of the syndiotactic component to the isotactic component is from 2:8 to 8:2 and the mixture is dissolved homogeneously in a non-polar solvent such as benzene or toluene. The resist composition thus obtained is applied onto a substrate to form a photosensitive element which is then exposed to electron rays to cause depolymerization of the polymer in the exposed areas and developed with an organic solvent to form an image which is excellent in contrast and resolving power and devoid of pinholes.
Claims11
A method for forming images characterized by applying onto a substrate a thin film of a sterocomplex composed of syndiotactic poly(methyl methacrylate) obtained by radical polymerization and poly(methyl methacrylate) obtained by anionic polymerization and containing the isotactic structure, exposing said thin film to irradiation by electron rays through an original to effect depolymerization of the polymer in the exposed areas and thereafter washing off the depolymerized substance with an organic solvent.
A resist material capable of affording images by irradiation with electron rays which comprises a substrate coated with a thin film of a stereocomplex composed of syndiotactic poly(methyl methacrylate) obtained by radical polymerization and poly(methyl methacrylate) obtained by anionic polymerization and having the isotactic structure in a ratio by weight of 2:8 to 8:2.
A resist composition capable of affording images by irradiation with electron rays which comprises a non-polar solvent having dissolved therein syndiotactic poly(methyl methacrylate) obtained by radical polymerization and poly(methyl methacrylate) obtained by anionic polymerization and having the isotactic structure in such proportion that the ratio by weight of the syndiotactic component to the isotactic component is from 2:8 to 8:2.
Dependencies are inferred from the claim text.