US 4,049,857 AGranted

Deposition mask and methods of making same

AssigneeInternational Business Machines Corporation

InventorRobert Hammer

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Abstract

The invention provides a reinforced mask which enables closely spaced strips or other narrowly separated parts of a deposited pattern to be formed upon a substrate by a non-line-of-sight deposition process (such as ion plating or sputter deposition) without causing unwanted voids or discontinuities to appear in the deposited pattern at points that underlie the reinforcing ribs on the mask. The mask is formed by a selective material removing process that produces a thin web adjoining one or more relatively thick ribs that provide rigidity to the web. In those parts of the mask where the reinforcing ribs extend across slots or other openings in the web, the masking material is removed to a depth which exceeds the web thickness, thus raising the undersides of the ribs above the web surface to provide clearance for the vaporized material which is being deposited upon the substrate through the mask openings so that this material has ready access to points located directly beneath the ribs as well as points that are between the ribs. The ribs therefore can serve their reinforcing function without producing unwanted voids or thin spots in the deposited pattern.

Claims2

Dependent claims

A vapor deposition mask comprising an integral body of material having a web reinforced by at least one rib,

the web having a thickness small compared with that of other portions of said mask and adapted to seat against the surface upon which vaporized material is to be deposited through said mask,
openings extending through said web to define the deposited pattern, at least some of said openings being positioned close to each other so that between each such pair of adjacent openings there is an intervening part of said web having relatively small cross-sectional size and little inherent rigidity,
each reinforcing rib having a thickness at least three times that of said web and extending across one or more of said openings therein,
at least some of said openings extending from a point on one side of said rib to a point on the other side of said rib,
the portion of said rib which bridges each of said openings being recessed so that such opening is effectively extended from said web into said rib to a depth substantially exceeding the web thickness, thus providing a raised bridge portion in said rib above each such opening to afford ample clearance for the passage of vaporized material around said rib and through such opening, said rib giving sufficient support to the tenuous portions of said web which are located between or surrounded by openings in said web to hold such web portions against substantial movements relative to each other and the adjacent parts of the mask while the mask is disengaged from said surface, thereby insuring that said mask is usable repetitively in vapor depositing operations notwithstanding the inherent weakness that such tenuous web portions would have in the absence of support by said rib.

2 more elements

Dependencies are inferred from the claim text.