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US 4,048,462 AGranted
Compact rotary evaporation source
AssigneeAirco, Inc.
InventorsRussell J. Hill, Kazumi N. Tsujimoto
Life of this patent
Estimating the term…
Abstract
An electron-beam apparatus for evaporating material is disclosed. The apparatus comprises a rotatable hearth on which the evaporant material can be placed and an electron-beam source which can be energized to evaporate the material. The apparatus is compact and durable because the electron beam source occupies a protected location which is closer to the rotational axis than is the hearth.
Claims11
An electron-beam apparatus for evaporating material placed on a hearth, comprising:
- a hearth mounted for rotation about a generally vertical axis, the hearth having a point which is furthest from the axis and an annular area for receiving material to be evaporated, the annular area lying generally in a horizontal plane perpendicular to the rotational axis;
- an electron-beam gun which can be energized to form an electron beam for evaporating material located within an impact area in the annular area on the hearth, all of which electron-beam gun is located closer to the rotational axis than the point of the hearth which is furthest from the axis;
- and
- magnetic means for deflecting the beam from the electron gun to the impact area along a curved path the final portion of which path is directed generally away from the axis of rotation.
1 more element
An evaporation source for electron-beam evaporation in a vacuum comprising:
- an annular hearth having an inner perimeter and a substantially horizontal surface from which material is evaporated;
- means for rotating said hearth about a generally vertical central axis;
- means located wholly within the inner perimeter of said hearth and below the surface thereof for forming an electron beam;
- and
- means for deflecting said electron beam upward from said beam forming means, across the inner perimeter, above said surface and onto a localized area of said surface outside the inner perimeter of said annular hearth.
2 more elements
Dependencies are inferred from the claim text.