Mask plate handling method
AssigneeGCA Corporation
InventorAlan G. Flint
Life of this patent
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AssigneeGCA Corporation
InventorAlan G. Flint
Estimating the term…
Apparatus and method for handling articles, such as glass or ceramic plates, commonly referred to as masks, employed in the manufacture of semi-conductor devices. The masks are transported between two predetermined stations with a treating operation being performed thereon at an intermediate station. The subject apparatus utilizes a fluid bearing for removing a plurality of masks in sequence from an indexable carrier and for accurately positioning the masks in sequence relative to a vacuum transfer arm. The transfer arm positions the masks in a precisely oriented location on a rotatable vacuum chuck so that a predtermined operation may be formed thereon. Another vacuum transfer arm then moves the treated masks in sequence from the vacuum chuck and places the same onto another fluid bearing for introduction thereby into another indexable carrier. Specially designed vacuum transfer arms, and means for accurately positioning masks in sequence relative to an infeed transfer arm for precise positioning thereby on the vacuum chuck, are employed so that damage to the relatively fragile masks during transfer to and from, and spinning at, the treating station is obviated.
A method of handling polygonal masks to orient the masks in sequence with their corners in a particular orientation prior to transferring said masks from an orienting station to a treating station, comprising:
Dependencies are inferred from the claim text.