Workpiece handling system for vacuum processing

Apparatus for transporting a discrete workpiece between the outside and the inside of a pressure sealable chamber, comprising:

• a. a carrier for transporting at least one workpiece;
• b. a first lock connected to the chamber;
• c. a first door associated with the first lock and movable between an open position and a closed position in which the first lock can be pressure sealed;
• d. means mounted on the first door for receiving, supporting and transporting the carrier between the outside of the chamber and the first lock when the first door is moved between its open position and its closed position;
• e. first conveyor means mounted on the first door for driving the carrier and for conveying the carrier between the first lock and the chamber;
• f. a first gate located between the first lock and the chamber and movable between an open position in which the carrier can be conveyed between the lock and the inside of the chamber, and a closed position in which the chamber can be sealed;
• g. means for receiving and supporting the carrier inside the chamber;
• and
• h. a first hinge for supporting the first door.

Apparatus for feeding discrete workpieces to and from a vacuum chamber continuously maintained under vacuum conditions comprising:

• a. a load lock attached to the vacuum chamber and separated therefrom by a load gate movable between a closed sealed position and an open position where the load lock and the vacuum chamber are in direct communication, said load lock presenting a chamber which will receive at least one workpiece:
• b. an unload lock attached to the vacuum chamber and separated therefrom by an unload gate movable between a closed sealed position and an open position where the load lock and the vacuum chamber are in direct communication, said unload lock presenting a chamber which will receive at least one workpiece:
• c. a load door on the load lock which when closed, pressure seals the chamber in the load lock;
• d. an unload door on the unload lock which when closed, pressure seals the chamber in the unload lock;
• e. means for supporting at least one workpiece associated with the load door, so that when said load door is open, said supporting means will receive and support at least one workpiece outside of the load lock, and as said load door is moved to closed position, the workpiece will be transferred into the load lock;
• f. first conveyor means mounted on the load door for conveying the workpiece from the load lock to the vacuum chamber when the load door is closed and the load gate is open;
• g. means inside the vacuum chamber for receiving and supporting the workpiece when it is conveyed from the load lock;
• h. second conveyor means mounted on the unload door for conveying the workpiece from the vacuum chamber to the unload lock when the unload gate is open, and the unload door is closed;
• i. means for supporting at least one workpiece associated with the unload door, so that when said unload door is closed, the workpiece will be received and supported in the unload lock when it is conveyed from the vacuum chamber, and as the unload door is moved to an open position, the workpiece will be transferred out of the unload lock;
• j. means for controlling the pressure independently in each of the load lock, vacuum chamber and unload lock, so that a vacuum may be maintained continuously in the vacuum chamber, while a workpiece is conveyed into or out of said chamber;
• k. a first hinge for supporting the load door;
• and
• l. a second hinge for supporting the unload door.