Bipolar transistor structure having low saturation resistance

A monolithic semiconductor device structure characterized by low saturation resistance comprising:

• a first conductivity type substrate;
• a second conductivity type epitaxial layer on said substrate;
• a buried layer region of second conductivity type and substantially lower resistivity than said epitaxial layer selectively positioned between said epitaxial layer and said substrate;
• a narrow region of first conductivity type extending from the surface of said epitaxial layer through said layer to said substrate and isolating a portion of said epitaxial layer from other portions of said substrate and epitaxial layer;
• a deep collector contact region of second conductivity type extending from the surface of said epitaxial layer, partially through said layer and contacting said buried layer region;
• a pocket region of second conductivity type and substantially lower resistivity than said epitaxial layer formed within the isolated region, said pocket region comprising the collector region of said semiconductor device;
• a plurality of first conductivity type regions formed in said pocket region and comprising the base region of said semiconductor device;
• and
• a plurality of second conductivity type regions a first portion thereof formed in said plurality of first conductivity type regions and comprising the emitter region of said device and a second portion thereof formed in said pocket region and interdigitated with said plurality of first conductivity type regions, said second portion comprising portions of said collector region, said plurality of first conductivity type regions and said plurality of second conductivity type regions forming interdigitated base, emitter and collector regions.