US 3,957,512 AGranted

Method for the preparation of relief structures

AssigneeSiemens Aktiengesellschaft

InventorsWolfgang Kleeberg, Roland Rubner, Wieland Bartel

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Abstract

Novel cyclic monomers leaving two functional groups capable of undergoing condensation reactions to form amide, urea or urethane linkages and at least one photo or radiation-reactive group are condensed with cyclic comonomers to form a soluble, substantially-linear condensation pre-polymer. A solution of the prepolymer is applied to a substrate and the solution is evaporated off to form a film or foil. The photo or radiation-sensitive layer or foil is exposed or irradiated through a pattern, the unexposed or unirradiated part is dissolved or stripped off, and the relief structure which remains is annealed if necessary. The relief structures obtained are distinguished particularly by the sharpness of their edges, good mechanical and chemical properties as well as good insulating properties. They are suited particularly for the preparation of miniaturized insulating layers.

Claims10

Dependent claims

In a method for the preparation of relief structures consisting of highly heat resistant polymers comprising the steps of applying a soluble, photo or radiation-sensitive prepolymer of defined structure in the form of a film to a substrate or in the form of a foil, exposing or irradiating the photo or radiation active layer through a negative pattern, dissolving or stripping of the unexposed or unirradiated portions and annealing the relief structure obtained, the improvement which comprises forming said film or foil from a poly-addition or poly-condensation prepolymer having repeating units of the formula:

##EQU10## wherein, X and D each comprise a carbocyclic and/or heterocyclic nucleus;
G is selected from the group consisting of amide, urea or urethane linkages;
R* is an organic radical containing a photo- or radiation induced di- or polymerizable olefinic double bond;
and is a component of ester group CO.sub.2 R*, said group bound to said nucleus is ortho or peri position to G;
F is a group capable of reacting with the carbonyl group of CO.sub.2 R* to form a cyclic structure upon heating of the prepolymer to liberate R*OH;
and wherein F is arranged in ortho- or periposition to G;
x is 1 or 2;
and
y is 0 or 2.

6 more elements

Dependencies are inferred from the claim text.