Multi phase double level metal charge coupled device
AssigneeTexas Instruments Incorporated
InventorsGlenn A. Hartsell, Allan R. Kmetz
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Abstract
Adjacent CCD phase electrodes in different levels separated by an insulating layer are connected to multi level phase buses on one side of the phase electrode by secondary bus means extending from one electrode in one level to an electrode of the same phase spaced therefrom in a different level by way of a vias through the insulation layer at a location intermediate the buses and the phase electrodes.
Claims14
In an n phase serial charge coupled device shift register where a set of phase buses extend parallel one to another at plural levels above the surface of a semiconductor body displaced from one side of a channel formed in said body, which comprises:
- a. an array of phase electrodes positioned in at least two levels above said channel in spanning relation thereto with adjacent electrodes in different levels and separated by an insulating layer,
- b. secondary bus means to interconnect one of said electrodes in one level to an electrode spaced n electrodes therefrom in said array in a different level by way of a via through said layer intermediate said buses and said one side with an extension to one of said buses.
In a three phase serial charge coupled device shift register having a channel defined in a semiconductor body for movement therethrough of charge packets, the combination which comprises:
- a. a dual layered series of phase electrodes extending across said channel at the surface of said body with odd electrodes in a first level and even electrodes in a second level separated from said first level by an insulation layer,
- b. three parallel phase buses on one side of said channel two of which are on one of said levels and one of which is on the other of said levels,
- c. one conductive lead extending from each said electrode to form a series of leads the successive members of which alternate between said levels, and
- d. a conductive path between each electrode and one of said buses including a connection through vias in said insulation layer in a zone located between said channel and said buses said connection paralleling each given electrode to another electrode third in said series from said given electrode.
In a three phase serial charge coupled device shift register having a channel defined in a semiconductor body for movement therethrough of charge packets, the combination which comprises:
- a. a dual layered series of phase electrodes extending across said channel at the surface of said body with odd electrodes in a first level and even electrodes in a second level separated from said first level by an insulation layer,
- b. three parallel phase buses on one side of said channel two of which are on one of said levels and one of which is on the other of said levels, and
- c. conductive structures leading to said buses each connecting phase electrodes of like phase in pairs through vias in a zone between the phase electrodes and the phase buses.
In an n-phase serial charge coupled device shift register which a set of phase buses extend parallel to each other at plural levels above the surface of a semiconductor body displaced from one side of a channel formed in said body, the combination which comprises:
- a. an array of phase electrodes positioned in at least two levels above said channel in spanning relation thereto with adjacent electrodes in different levels electrically isolated from each other by an insulating layer;
- b. each said phase electrode having an integral inclined conductor at one end thereof, the inclined conductors at one of said two levels all inclined in one direction, and the inclined conductors at the other of said two levels all inclined in an opposite direction, at least one transverse extension from each phase bus connected by respective ones of said inclined conductors with a phase electrode at one of said two levels and with a phase electrode spaced n electrodes therefrom at the other of said two levels, such that the inclined conductors connected with any particular said transverse extension together define a generally Y-shaped structure.
Dependencies are inferred from the claim text.