Process for depositing transparent, electrically conductive tin containing oxide coatings on a substrate
AssigneeRCA Corporation
InventorsJames Kane, Hanspeter Schweizer
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Abstract
Certain volatile organotin compounds are vaporized in a heated carrier gas stream and brought into contact with a preheated substrate to be coated in an atmosphere containing oxygen. Indium oxide coatings may be doped with tin by vaporizing an organotin compound and an indium chelate of a .beta.-diketone and bringing the vapors in contact with a heated substrate in an oxidizing atmosphere.
Claims11
The process of depositing an oxide coating containing tin and indium on a substrate which comprises:
- a. vaporizing an indium chelate of 2,2,6,6-tetramethylheptane-3,5-dione,
- b. vaporizing an organotin compound having a vaporization temperature below about 200.degree.C.,
- c. heating said substrate to a temperature of from about 350.degree.C. to about 550.degree.C., and
- d. contacting said heated substrate with said indium vapor and said tin vapor in an oxidizing atmosphere.
The process of depositing transparent, uniform, electrically conductive tin doped indium oxide coatings on a substrate comprising:
- a. vaporizing an indium chelate of 2,2,6,6-tetramethylheptane-3,5-dione at a temperature of from about 180.degree. to about 250.degree.C.,
- b. vaporizing dibutyl tin diacetate at a temperature of from about 80.degree.C. to about 120.degree.C.,
- c. heating said substrate to a temperature of from about 350.degree.C. to about 550.degree.C.,
- d. and contacting said heated substrate with said indium vapor and said tin vapor in an oxidizing atmosphere.
Dependencies are inferred from the claim text.