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AssigneeHitachi, Ltd.
InventorsYoshio Matsumoto, Keiichi Okamoto
Estimating the term…
A positioning apparatus comprising marks for position detection which are respectively formed on a plurality of objects, means to cause optical images of the position detecting marks from the respective objects to reach a scanning mechanism, the scanning mechanism scanning the optical images at the same time, a plurality of detectors, each of which consists of a slit and a photoelectric element, the slits being arranged on an identical optical axis so that the optical images of the position detecting marks of the respective objects as scanned by the scanning mechanism may be detected respectively and individually, and a driving device which moves one of the plurality of objects on the basis of signals from the detectors, to effect the relative positioning of the plurality of objects.
An apparatus for relatively positioning two objects each having marks for position detection formed thereon at least at two spaced regions of the respective objects, comprising optical means for detecting said marks on said objects including at least first and second optical system means for dividing a reflecting optical image from said marks into first, second, and third optical images, a parallel prism for scanning and permeating said first, second, and third optical images, scanning plates each having a pair of slits therein and being arranged behind said parallel prism on a respective optical axis of said optical means to intercept a respective one of said optical images, photoelectric detecting means positioned behind each of said scanning plates to detect said optical images of said position detection marks, respectively, converter means for converting the output of said photoelectric detecting means into pulse signals, driving means for moving one of said objects, and coincidence means for operating said driving means until the signals from said converter means become coincident.
Dependencies are inferred from the claim text.