Method for forming micropatterns utilizing a transparent raised image as photomask
AssigneeFuji Photo Film Co., Ltd.
InventorMasamichi Sato
Life of this patent
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Abstract
A method for forming micropatterns comprising, superposing a transparent raised image formed on a transparent substrate on a photosensitive layer of a photographic material or forming a transparent raised image on the photosensitive layer of the photographic material, uniformly exposing the photosensitive layer through the transparent raised image to light to which the photosensitive layer is sensitive so that the light intensity at edges of the transparent image is non-uniform, and developing the photosensitive layer to form a micropattern corresponding to the outlines of the transparent raised image.
Claims15
A method for forming micropatterns comprising
- forming a transparent raised image on a photosensitive layer of a photographic material,
- uniformly exposing said photosensitive layer through said transparent raised image to parallel light to which said photosensitive layer is sensitive, so that the light intensity at the edges of said transparent raised image is non-uniform such that the portions of the photosensitive layer underlying said edges are not exposed, and
- developing said photosensitive layer to form a micropattern corresponding to the outlines of said transparent image.
A method for forming micropatterns comprising superposing a transparent raised image formed on a transparent substrate on a photosensitive layer of a photographic material,
- uniformly exposing said photosensitive layer through said transparent raised image to parallel light to which said photosensitive layer is sensitive, so that the light intensity at the edges of said transparent raised image is non-uniform, such that the portions of the photosensitive layer underlying said edges are not exposed, and
- developing said photosensitive layer to form a micropattern corresponding to the outlines of said transparent image.
Dependencies are inferred from the claim text.