Scanning photoelectric microscope
AssigneesHitachi, Ltd., Yasujiro Oshima
InventorsKeiichi Okamoto, Yoshio Matsumoto, Yasujiro Oshima
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AssigneesHitachi, Ltd., Yasujiro Oshima
InventorsKeiichi Okamoto, Yoshio Matsumoto, Yasujiro Oshima
Estimating the term…
The present invention discloses a scanning photoelectric microscope in which a first reference object to be measured which is mounted on a stationary support is disposed relative to a second object to be measured which is disposed on a slidable table so as to form on both sides of the first object to be measured two indication intervals, which are caused to coincide with each other for alignment. The scanning photoelectric microscope according to the present invention comprises a scanning device for scanning an image reflected from the two indication intervals formed by the first and second objects to be measured at a constant speed to effect parallel displacement, a marker device for detecting positions of a scanned image corresponding to those of motion of the scanning device, and a circuit for detecting the two indication intervals detected by the scanning device in terms of time in response to a signal from the marker device, the second object to be measured being shifted until the two indication intervals coincide with each other.
A scanning photoelectric microscope adapted for use in measuring indication intervals of an object to be measured in terms of time, comprising first means for arranging a first object to be measured which is mounted on a stationary support and a second object to be measured which is disposed on a slidable table in slightly spaced apart and superimposed relationship to form a plurality of indication intervals in association with said first and second objects to be measured, a scanning device for scanning a reflected image of the indication intervals in said first means at a predetermined cycle to effect parallel displacement of said reflected image, second means including a photoelectric element for converting the scanned and reflected image which is passed through a slit from said scanning device into a signal, third means for amplifying and shaping said signal from said second means to generate gate signals corresponding to said plurality of indication intervals, respectively, a marker device for generating a marker signal each time when said scanning device recurrently scans said reflected image of said plurality of indication intervals, a reversible counter for integrating the number of pulses from an oscillator in response to a first gate signal generated from said third means after said marker device has generated said marker signal and subtracting the number of the pulses from the oscillator in response to a next gate pulse generated from said third means to detect the difference between said plurality of indication intervals, and means for shifting said table on which said second object to be measured is disposed in accordance with the content of said reversible counter for alignment between said first and second objects to be measured.
A scanning photoelectric microscope comprising:
Dependencies are inferred from the claim text.